JAMP-10s scanning Auger microprobe with thin-window EDXA

Auger electron spectroscopy (AES)  is a unique surface analysis tool that is sensitive to the elemtnts in the top two-to-three atomic layers on a surface.  At EMSL, AES has been used in a wide array of services for our clients.
Applications included:

• Elemental concentration depth profile
• Thin films analysis
• Contamination study
• Corrosion and oxidation study
• Metallurgical analysis (surface/grain boundaries)
• Failure Analysis

Instrumentation:  Scanning Auger microscope equipped with sputtering ion gun and EDX attachment.

The figure below presents an AES spectrum of ZnO thin film showing Cl contamination.