JAMP-10s scanning Auger microprobe with thin-window EDXA
Auger electron spectroscopy (AES) is a unique surface analysis tool that is sensitive to the elemtnts in the top two-to-three atomic layers on a surface. At EMSL, AES has been used in a wide array of services for our clients.
- Elemental concentration depth profile
- Thin films analysis
- Contamination study
- Corrosion and oxidation study
- Metallurgical analysis (surface/grain boundaries)
- Failure Analysis
Instrumentation: Scanning Auger microscope equipped with sputtering ion gun and EDX attachment.
The figure below presents an AES spectrum of ZnO thin film showing Cl contamination.